Kai-sheng Luo
According to our database1,
Kai-sheng Luo
authored at least 4 papers
between 2013 and 2015.
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Bibliography
2015
Fast Level-Set-Based Inverse Lithography Algorithm for Process Robustness Improvement and Its Application.
J. Comput. Sci. Technol., 2015
2014
J. Zhejiang Univ. Sci. C, 2014
2013
J. Zhejiang Univ. Sci. C, 2013
A New Level-Set-Based Inverse Lithography Algorithm for Process Robustness Improvement with Attenuated Phase Shift Mask.
Proceedings of the 2013 International Conference on Computer-Aided Design and Computer Graphics, 2013