K. Sah

According to our database, K. Sah authored at least 1 paper in 2024.

Collaborative distances:

• Dijkstra number of four.
• Erdős number of four.

2024

Mitigating Line-Break Defectivity with a Sandwiched TiN or W Layer for Metal Pitch 18 NM Aspect Ratio 6 Semi-Damascene Interconnects.

Anshul Gupta, Shreya Kundu, Stefan Decoster, K. Sah, G. Delie, B. Truijen, Davide Tierno, Giulio Marti, O. Varela Pedreira, B. Kenens, Y. Hermans, C. Adelmann, B. de Wachter, Ivan Ciofi, G. Murdoch, A. Cross, Seongho Park, Zsolt Tokei

Proceedings of the IEEE Symposium on VLSI Technology and Circuits 2024, 2024