Junmo Koo
According to our database1,
Junmo Koo
authored at least 3 papers
between 2016 and 2019.
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Bibliography
2019
Design of a self-tuning adaptive model predictive controller using recursive model parameter estimation for real-time plasma variable control.
Comput. Chem. Eng., 2019
2017
Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment control.
Comput. Chem. Eng., 2017
2016
Improvement of principal component analysis modeling for plasma etch processes through discrete wavelet transform and automatic variable selection.
Comput. Chem. Eng., 2016