Juhun Park
According to our database1,
Juhun Park
authored at least 2 papers
between 2022 and 2024.
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Bibliography
2024
Highly manufacturable Self-Aigned Direct Backside Contact (SA-DBC) and Backside Gate Contact (BGC) for 3-dimensional Stacked FET at 48nm gate pitch.
Proceedings of the IEEE Symposium on VLSI Technology and Circuits 2024, 2024
2022
Middle-of-the-Line Reliability Characterization of Recessed-Diffusion-Contact Adopted sub-5nm Logic Technology.
Proceedings of the IEEE International Reliability Physics Symposium, 2022