Juergen Kuehnle

According to our database, Juergen Kuehnle authored at least 1 paper in 2022.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2022

An IoT Solution for Condition Monitoring of a Lithography Coater Tool in a Semiconductor Fab.

Yvonne Bergmann, Michael Leippert, Juergen Kuehnle, Johannes Kristan, Sven Erik Jeroschewski, Lukas Römer, Paul Knaus, Axel Wogawa

Proceedings of the 5th IEEE International Conference on Industrial Cyber-Physical Systems, 2022