Jens Reichelt

According to our database, Jens Reichelt authored at least 1 paper in 2005.

Collaborative distances:

• Dijkstra number of seven.
• Erdős number of seven.

2005

On the Effect of Cationic Surfactants in the Rinse to Reduce Pattern Collapse in High Aspect Ratio Patterning of Photoresists.

Karina Grundke, Astrid Drechsler, Nicole Petong, Cornelia Bellmann, Manfred Stamm, Odo Wunnicke, Jens Reichelt, Iris Mäge, B. Pinter, T. Pearce, M. Voigt

Proceedings of the 2005 International Conference on MEMS, 2005