Jeff Shu

According to our database, Jeff Shu authored at least 2 papers between 2012 and 2013.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of six.

2013

Impact of precursors choice on characteristics of PEALD SiN for spacer applications.

Dina H. Triyoso, Klaus Hempel, Susanne Ohsiek, Jeff Shu, Jamie K. Schaeffer, Markus Lenski

Proceedings of 2013 International Conference on IC Design & Technology, 2013

2012

Robust PEALD SiN spacer for gate first high-k metal gate integration.

D. H. Triyoso, V. Jaschke, Jeff Shu, S. Mutas, Klaus Hempel, Jamie K. Schaeffer, Markus Lenski

Proceedings of the IEEE International Conference on IC Design & Technology, 2012