Jakey Blue

Orcid: 0000-0001-7771-4368

According to our database1, Jakey Blue authored at least 15 papers between 2009 and 2021.

Collaborative distances:
  • Dijkstra number2 of five.
  • Erdős number3 of four.

Timeline

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Links

On csauthors.net:

Bibliography

2021
Equipment deterioration modeling and cause diagnosis in semiconductor manufacturing.
Int. J. Intell. Syst., 2021

2020
A Structure Data-Driven Framework for Virtual Metrology Modeling.
IEEE Trans Autom. Sci. Eng., 2020

A physics-informed Run-to-Run control framework for semiconductor manufacturing.
Expert Syst. Appl., 2020

2018
Impact of integrating equipment health in production scheduling for semiconductor fabrication.
Comput. Ind. Eng., 2018

Automatic equipment fault fingerprint extraction for the fault diagnostic on the batch process data.
Appl. Soft Comput., 2018

Virtual Metrology Modeling based on Gaussian Bayesian Network.
Proceedings of the 2018 Winter Simulation Conference, 2018

The Detection and the control of Machine/Chamber Mismatching in Semiconductormanufacturing.
Proceedings of the 2018 Winter Simulation Conference, 2018

Equipment Deterioration Modeling and Causes Diagnosis in Semiconductor Manufacturing.
Proceedings of the 14th IEEE International Conference on Automation Science and Engineering, 2018

2017
Translation-Invariant Multiscale Energy-Based PCA for Monitoring Batch Processes in Semiconductor Manufacturing.
IEEE Trans Autom. Sci. Eng., 2017

2016
Run-to-Run sensor variation monitoring for process fault diagnosis in semiconductor manufacturing.
Proceedings of the Winter Simulation Conference, 2016

Equipment Condition Diagnosis and Fault Fingerprint Extraction in Semiconductor Manufacturing.
Proceedings of the 15th IEEE International Conference on Machine Learning and Applications, 2016

2015
Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook.
J. Sched., 2015

2014
Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook.
Proceedings of the 2014 IEEE International Conference on Automation Science and Engineering, 2014

2011
Spatial Variance Spectrum Analysis and Its Application to Unsupervised Detection of Systematic Wafer Spatial Variations.
IEEE Trans Autom. Sci. Eng., 2011

2009
Optimum sampling for track PEB CD Integrated Metrology.
Proceedings of the IEEE Conference on Automation Science and Engineering, 2009


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