J. Pétry
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Bibliography
2005
On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers.
Microelectron. Reliab., 2005
Breakdown spots of ultra-thin (EOT<1.5nm) HfO<sub>2</sub>/SiO<sub>2</sub> stacks observed with enhanced - CAFM.
Microelectron. Reliab., 2005