I. J. Kim

According to our database, I. J. Kim authored at least 1 paper in 2012.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

2012

Silicon nitride etch characteristics in SF₆/O₂ and C₃F₆O/O₂ plasmas and evaluation of their global warming effects.

I. J. Kim, H. K. Moon, J. H. Lee, Nae-Eung Lee, J. W. Jung, S. H. Cho

Microelectron. Reliab., 2012