Heinz-Ulrich Scheunemann

According to our database, Heinz-Ulrich Scheunemann authored at least 2 papers in 2003.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of five.

2003

Fabrication of Ultra Thick, Ultra High Aspect Ratio Microcomponents by Deep and Ultra Deep X-Ray Lithography.

Linke Jian, Bernd Loechel, Heinz-Ulrich Scheunemann, Martin Bednarzik, Yohannes M. Desta, Jost Goettert

Proceedings of the 2003 International Conference on MEMS, 2003

First Results in Patterning of Ultra High Aspect Ratio Microstructures by a 4T Wave Length Shifter at BESSY.

Martin Bednarzik, Heinz-Ulrich Scheunemann, Alexander Barth, Daniel Schondelmaier, Bernd Loechel

Proceedings of the 2003 International Conference on MEMS, 2003