Gottlieb S. Oehrlein

Orcid: 0000-0002-6693-4274

According to our database1, Gottlieb S. Oehrlein authored at least 2 papers between 1992 and 1999.

Collaborative distances:
  • Dijkstra number2 of six.
  • Erdős number3 of five.

Timeline

Legend:

Book 
In proceedings 
Article 
PhD thesis 
Dataset
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Links

On csauthors.net:

Bibliography

1999
Surface science issues in plasma etching.
IBM J. Res. Dev., 1999

1992
Plasma-based dry etching techniques in the silicon integrated circuit technology.
IBM J. Res. Dev., 1992


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