Fazhi Song
Orcid: 0000-0003-1561-2328
According to our database1,
Fazhi Song
authored at least 10 papers
between 2017 and 2025.
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Bibliography
2025
Beyond Performance of Learning Control Subject to Uncertainties and Noise: A Frequency-Domain Approach Applied to Wafer Stages.
IEEE CAA J. Autom. Sinica, January, 2025
2024
Consensus of Input Constrained Multi-Agent Systems by Dynamic Time-Varying Event-Triggered Strategy With a Designable Minimal Inter-Event Time.
IEEE Trans. Circuits Syst. II Express Briefs, April, 2024
Motion Control of Wafer Scanners in Lithography Systems: From Setpoint Generation to Multistage Coordination.
IEEE Trans. Instrum. Meas., 2024
2022
Data-Driven Feedforward Learning With Force Ripple Compensation for Wafer Stages: A Variable-Gain Robust Approach.
IEEE Trans. Neural Networks Learn. Syst., 2022
IEEE Trans. Ind. Electron., 2022
2020
Enhancing Accuracy and Numerical Stability for Repetitive Time-Varying System Identification: An Iterative Learning Approach.
IEEE Access, 2020
2019
Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables.
IEEE Trans. Ind. Electron., 2019
2018
Iterative Learning Identification and Compensation of Space-Periodic Disturbance in PMLSM Systems With Time Delay.
IEEE Trans. Ind. Electron., 2018
Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage.
Complex., 2018
2017
Iterative Learning Identification with Bias Compensation for Stochastic Linear Time-Varying Systems.
Proceedings of the Intelligent Computing, Networked Control, and Their Engineering Applications, 2017