Fang Yang

According to our database, Fang Yang authored at least 8 papers between 2013 and 2018.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of four.

2018

A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes with High Roundness.

Taotao Guan, Fang Yang, Wei Wang, Peng Liu, Zexin Fan, Leijian Cheng, Zikun Chen, Runze Yu, Qiancheng Zhao, Wei Wang, Dacheng Zhang

Proceedings of the 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, 2018

2015

Parylene C autofluorescence for on-chip highest processing temperature sensing.

Lingqian Zhang, Yaoping Liu, Fang Yang, Wei Wang, Dacheng Zhang, Zhihong Li

Proceedings of the 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2015

Investigation of stress rupture properties of micro beams using the piezoresistive effect.

Taotao Guan, Fang Yang, Wei Wang, Xian Huang, Jun He, Li Zhang, Fengshan Fu, Rui Li, Dacheng Zhang

Proceedings of the 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2015

Discussion and analysis of Au/a-Si contact resistance in MEMS/NEMS devices.

Fengshan Fu, Fang Yang, Wei Wang, Xian Huang, Jun He, Li Zhang, Taotao Guan, Rui Li, Dacheng Zhang

Proceedings of the 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2015

2014

Study on compatible CMOS-MEMS process with surface micromachining for the application of monolithic integration.

Danqi Zhao, Xian Huang, Jun He, Li Zhang, Peng Liu, Fang Yang, Dacheng Zhang

Proceedings of the 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2014

Evaluation of Au/a-Si eutectic wafer level bonding process.

Xian Huang, Jun He, Li Zhang, Fang Yang, Dacheng Zhang

Proceedings of the 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2014

Mechanical strength measurement of micro anchor-beam combined structure fabricated by silicon-on-glass process.

Jun He, Xian Huang, Li Zhang, Danqi Zhao, Fang Yang, Wei Wang, Dacheng Zhang

Proceedings of the 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2014

2013

Effect of phosphorus doping on the performance of Au/Si inter-diffusion.

Xian Huang, Fang Yang, Danqi Zhao, Jun He, Xuejiao Fan, Wei Wang, Dacheng Zhang

Proceedings of the 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2013