Etienne Herth
Orcid: 0000-0002-8321-5060
According to our database1,
Etienne Herth
authored at least 3 papers
between 2010 and 2022.
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Bibliography
2022
Electrical and Optical Characterization of SAW Sensors Coated with Parylene C and Their Analysis Using the Coupling-of-Modes (COM) Theory.
Sensors, 2022
2012
Investigation of optical and chemical bond properties of hydrogenated amorphous silicon nitride for optoelectronics applications.
Microelectron. Reliab., 2012
2010
Optimization of SiN<sub>X</sub>: H films deposited by PECVD for reliability of electronic, microsystems and optical applications.
Microelectron. Reliab., 2010