Dirk Lewke

According to our database, Dirk Lewke authored at least 2 papers between 2011 and 2016.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

2016

Direct optical stress sensing in semiconductor manufacturing using Raman micro-spectrometry.

Martin De Biasio, Martin Kraft, Michael Roesner, Christoph Bergmann, Maria Mercedes Cerezuela-Barreto, Dirk Lewke, Martin Schellenberger

Proceedings of the 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016, 2016

2011

A virtual equipment as a test bench for evaluating virtual metrology algorithms.

Andreas Mattes, Matthias Koitzsch, Dirk Lewke, Michael Müller-Zell, Martin Schellenberger

Proceedings of the Winter Simulation Conference 2011, 2011