Daniel Beckmeier

According to our database¹, Daniel Beckmeier authored at least 2 papers between 2016 and 2022.

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2022

Revealing stresses for plasma induced damage detection in thick oxides.

[BibT_eX]

[DOI]

Proceedings of the IEEE International Reliability Physics Symposium, 2022

2016

Plasma process induced damage detection by fast wafer level reliability monitoring for automotive applications.

[BibT_eX]

[DOI]

Microelectron. Reliab., 2016