Chuen-Guang Chao

According to our database, Chuen-Guang Chao authored at least 3 papers between 2004 and 2006.

Collaborative distances:

• Dijkstra number of six.
• Erdős number of six.

2006

Control ability of spin coating planarization of resist filmand optimal control of developers.

Yang-Kuao Kuo, Chuen-Guang Chao

Microelectron. J., 2006

2005

Analysis of the effects of reflectance and refraction generated by wafers made from fused silica, ALOxNy and TiSixNy under different light sources on pattern length and best focus.

Yang-Kuao Kuo, Chuen-Guang Chao

Microelectron. J., 2005

2004

Analysis of instability line width and white wall created by the photolithography process.

Yang-Kuao Kuo, Chuen-Guang Chao, Chi-Yuan Lin

Microelectron. J., 2004