C. F. Tsang

According to our database1, C. F. Tsang authored at least 4 papers between 2003 and 2005.

Collaborative distances:
  • Dijkstra number2 of five.
  • Erdős number3 of five.

Timeline

Legend:

Book 
In proceedings 
Article 
PhD thesis 
Dataset
Other 

Links

On csauthors.net:

Bibliography

2005
A study of post-etch wet clean on electrical and reliability performance of Cu/low k interconnections.
Microelectron. Reliab., 2005

Process improvement of 0.13mum Cu/Low K (Black Diamond<sup>TM</sup>) dual damascene interconnection.
Microelectron. Reliab., 2005

2004
Impact of barrier deposition process on electrical and reliability performance of Cu/CVD low k SiOCH metallization.
Microelectron. J., 2004

2003
Study and improvement of electrical performance of 130 nm Cu/CVD low k SiOCH interconnect related to via etch process.
Microelectron. J., 2003


  Loading...