Byungwhan Kim
According to our database1,
Byungwhan Kim
authored at least 16 papers
between 2002 and 2013.
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Bibliography
2013
Exponentially weighted moving average-based procedure with adaptive thresholding for monitoring nonlinear profiles: Monitoring of plasma etch process in semiconductor manufacturing.
Expert Syst. Appl., 2013
2012
Comput. Electr. Eng., 2012
Use of neural network to in situ conditioning of semiconductor plasma processing equipment.
Appl. Soft Comput., 2012
2011
Neural network modeling of inter-characteristics of silicon nitride film deposited by using a plasma-enhanced chemical vapor deposition.
Expert Syst. Appl., 2011
Wavelet-coupled backpropagation neural network as a chamber leak detector of plasma processing equipment.
Expert Syst. Appl., 2011
2010
Optimization of optical lens-controlled scanning electron microscopic resolution using generalized regression neural network and genetic algorithm.
Expert Syst. Appl., 2010
2009
Use of adaptive network fuzzy inference system to predict plasma charging damage on electrical MOSFET properties.
Expert Syst. Appl., 2009
Use of neural network to model X-ray photoelectron spectroscopy data for diagnosis of plasma etch equipment.
Expert Syst. Appl., 2009
Modeling of Thin Film Process Data Using a Genetic Algorithm-Optimized Initial Weight of Backpropagation Neural Network.
Appl. Artif. Intell., 2009
2007
Adaptive Network-Based Fuzzy Inference Model of Plasma Enhanced Chemical Vapor Deposition Process.
Proceedings of the Advances in Neural Networks, 2007
2006
Diagnosis Model of Radio Frequency Impedance Matching in Plasma Equipment by Using Neural Network and Wavelets.
Proceedings of the PRICAI 2006: Trends in Artificial Intelligence, 2006
Neural Network Recognition of Scanning Electron Microscope Image for Plasma Diagnosis.
Proceedings of the PRICAI 2006: Trends in Artificial Intelligence, 2006
Proceedings of the Advances in Neural Networks - ISNN 2006, Third International Symposium on Neural Networks, Chengdu, China, May 28, 2006
Recognition of Plasma-Induced X-Ray Photoelectron Spectroscopy Fault Pattern Using Wavelet and Neural Network.
Proceedings of the Advances in Neural Networks - ISNN 2006, Third International Symposium on Neural Networks, Chengdu, China, May 28, 2006
Prediction of Radio Frequency Impedance Matching in Plasma Equipment Using Neural Network.
Proceedings of the Advances in Neural Networks - ISNN 2006, Third International Symposium on Neural Networks, Chengdu, China, May 28, 2006
2002