×
2021
Novel Selective Area Recessed Regrowth-free Ohmic Contacts to High Al-content Barrier.
[DOI]
Hao Lu
,
Xiaohua Ma
,
Bin Hou
,
Ling Yang
,
Teng Huo
,
Zeyan Si
,
Yue Hao
Proceedings of the 2021 IEEE International Conference on Integrated Circuits, 2021