Study on layout of double rotated serpentine springs for vertical-comb-driven torsional micromirror.
CoRR, 2024
Influence of Scallops in Deep Reactive Ion Etching on Vertical Comb-Based Sensors/Actuators.
Proceedings of the 2024 IEEE SENSORS, Kobe, Japan, October 20-23, 2024, 2024
Modeling and Optimization of Multi-terraced-Plate Electrostatic Actuator.
Proceedings of the 2024 IEEE SENSORS, Kobe, Japan, October 20-23, 2024, 2024