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1996
Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing.
[DOI]
Edward A. Rietman
,
Suresh H. Patel
,
Earl R. Lory
Comput. Oper. Res., 1996
1983
Parallel fault simulation using distributed processing.
[DOI]
Ytzhak H. Levendel
,
Prem R. Menon
,
Suresh H. Patel
Bell Syst. Tech. J., 1983