Computational fluid dynamics modeling of a discrete feed atomic layer deposition reactor: Application to reactor design and operation.

Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design.

Multiscale computational fluid dynamics modeling of spatial thermal atomic layer etching.

Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor.

Integration of feedback control and run-to-run control for plasma enhanced atomic layer deposition of hafnium oxide thin films.