Design and Analysis of a New Tuning Fork Structure for Resonant Pressure Sensor.
Micromachines, 2016
A low-noise CMOS interface circuit for resonant pressure sensor.
Proceedings of the 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2014
Microfabricated SOI pressure sensor using dynamically balanced lateral resonator.
Proceedings of the 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2014
A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure.
Sensors, 2013
MEMS Biomimetic Acoustic Pressure Gradient Sensitive Structure for Sound Source Localization.
Sensors, 2009