2015
An SEM/STM based nanoprobing and TEM study of breakdown locations in HfO<sub>2</sub>/SiO<sub>x</sub> dielectric stacks for failure analysis.
[DOI]
Kalya Shubhakar
,
Michel Bosman
,
O. A. Neucheva
,
Y. C. Loke
,
Nagarajan Raghavan
,
R. Thamankar
,
Alok Ranjan
,
Sean J. O'Shea
,
Kin Leong Pey
Microelectron. Reliab., 2015