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2021
Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm Cluster Tools.
[DOI]
WenQing Xiong
,
ChunRong Pan
,
Yan Qiao
,
Naiqi Wu
,
Mingxin Chen
,
PinHui Hsieh
IEEE Trans Autom. Sci. Eng., 2021