2005
Conduction band states of transition metal (TM) high-k gate dielectrics as determined from X-ray absorption spectra.
[DOI]
Gerald Lucovsky
,
J. G. Hong
,
Charles C. Fulton
,
N. A. Stoute
,
Y. Zou
,
Robert J. Nemanich
,
David E. Aspnes
,
H. Ade
,
D. G. Schlom
Microelectron. Reliab., 2005