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2013
2 MeV electron irradiation effects on the electrical characteristics of MOS capacitors with ALD Al<sub>2</sub>O<sub>3</sub> dielectrics of different thickness.
[DOI]
Joan Marc Rafí
,
M. B. González
,
Kenichiro Takakura
,
I. Tsunoda
,
M. Yoneoka
,
Oihane Beldarrain
,
Miguel Zabala
,
Francesca Campabadal
Microelectron. Reliab., 2013