2018
Induced Stress Enhancement Using U-shaped Arms in a 3-Axis Piezoresistive MEMS Accelerometer.
[DOI]
M. Hadi Said
,
Fares Tounsi
,
Brahim Mezghani
,
Aftab Ahmed
,
Shardul Pandit
,
Rajul Patkar
,
Pradeep Dixit
,
M. S. Baghin
,
V. Ramgopal Rao
Proceedings of the 15th International Multi-Conference on Systems, Signals & Devices, 2018