2020
Reliability Characteristics of a High Density Metal- Insulator-Metal Capacitor on Intel's 10+ Process.
[DOI]
Cheyun Lin
,
Uygar E. Avci
,
M. A. Blount
,
Rohit Grover
,
Jeffery Hicks
,
R. Kasim
,
A. Kundu
,
C. M. Pelto
,
C. Ryder
,
Anthony Schmitz
,
K. Sethi
,
D. Seghete
,
D. J. Towner
,
A. J. Welsh
,
J. Weber
,
C. Auth
Proceedings of the 2020 IEEE International Reliability Physics Symposium, 2020