2013
Fluorine improvement of MOSFET interface as revealed by RTS measurements and HRTEM.
[DOI]
Joo Hyung Kim
,
Jung Joo Kim
,
Chang-Eun Lee
,
Jong Ho Lee
,
Dong Seok Kim
,
Nam Joo Kim
,
Kwang Dong Yoo
,
Heung-Soo Park
Proceedings of the 2013 IEEE Radio and Wireless Symposium, 2013