2017
A real-time temperature compensation algorithm for a force-rebalanced MEMS capacitive accelerometer based on resonant frequency.
[DOI]
Jiehui Du
,
Yixuan Guo
,
Yiyu Lin
,
Xudong Zheng
,
Zhonghe Jin
Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2017