2021
Effect of the Different Substrates and the Film Thickness on the Surface Roughness of Step Structure.
[DOI]
Chenying Wang
,
Jiangtao Pu
,
Lei Li
,
Weixuan Jing
,
Yijun Zhang
,
Yaxin Zhang
,
Feng Han
,
Ming Liu
,
Wei Ren
,
Zhuangde Jiang
Proceedings of the 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2021