2013
Bilayer wire-grid polarizers for DUV to IR fabricated using EUV interference and nanoimprint lithography.
[DOI]
Li Wang
,
H. Schift
,
P. M. Kristiansen
,
Konstantins Jefimovs
,
H. H. Solak
,
J. Gobrecht
,
Yasin Ekinci
Proceedings of the 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2013