2024
A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range.
IEEE Trans. Ind. Electron., June, 2024

Noise Analysis and In Situ Detection of the Electromagnetic Servo Actuator for a Nano-g Accelerometer With a Large Dynamic Range.
IEEE Trans. Instrum. Meas., 2024

Tilt-Induced Noise Improvement of a Nano-g MEMS Accelerometer for Lunar Seismograph With Omnidirectional Deployment.
IEEE Trans. Instrum. Meas., 2024

Multiaccelerometer-Based Method for High-Precision Angular Acceleration Measurement of Turntable.
IEEE Trans. Instrum. Meas., 2024

2023
An Opto-mechanical MEMS Accelerometer with Noise Floor of 40 ng/Hz<sup>1/2</sup>.
Proceedings of the 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2023

2021
Cross-Coupling Coefficient Estimation of a Nano-g Accelerometer by Continuous Rotation Modulation on a Tilted Rate Table.
IEEE Trans. Instrum. Meas., 2021

2020
Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review.
Sensors, 2020

An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer.
Sensors, 2020

Temperature Gradient Method for Alleviating Bonding-Induced Warpage in a High-Precision Capacitive MEMS Accelerometer.
Sensors, 2020

A High-sensitivity Optical MEMS Accelerometer based on SOI Double-side Micromachining.
Proceedings of the 2020 IEEE Sensors, Rotterdam, The Netherlands, October 25-28, 2020, 2020

2019
A Universal High-Sensitivity Area-Variation Capacitive Displacement Transducer (CDT) Based on Fringe Effect.
IEEE Access, 2019

2018
Scale Factor Calibration for a Rotating Accelerometer Gravity Gradiometer.
Sensors, 2018

2017
High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer.
Sensors, 2017