2013
Influence of fluorine-based dry etching on electrical parameters of AlGaN/GaN-on-Si High Electron Mobility Transistors.
[DOI]
Davide Bisi
,
Matteo Meneghini
,
Antonio Stocco
,
Giulia Cibin
,
Alessio Pantellini
,
Antonio Nanni
,
Claudio Lanzieri
,
Enrico Zanoni
,
Gaudenzio Meneghesso
Proceedings of the European Solid-State Device Research Conference, 2013