Precision Synchronous Control of Multiple Motion Systems: A Tube-Based MPC Approach.

Beyond Performance of Learning Control Subject to Uncertainties and Noise: A Frequency-Domain Approach Applied to Wafer Stages.

Data-Based Dynamic Decoupling Control for MIMO Precision Motion Stages With Position-Dependent Disturbances.

Consensus of Input Constrained Multi-Agent Systems by Dynamic Time-Varying Event-Triggered Strategy With a Designable Minimal Inter-Event Time.

Motion Control of Wafer Scanners in Lithography Systems: From Setpoint Generation to Multistage Coordination.

Data-Driven Feedforward Learning With Force Ripple Compensation for Wafer Stages: A Variable-Gain Robust Approach.

Learning Control for Motion Coordination in Wafer Scanners: Toward Gain Adaptation.

Enhancing Accuracy and Numerical Stability for Repetitive Time-Varying System Identification: An Iterative Learning Approach.

Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables.

Iterative Learning Identification and Compensation of Space-Periodic Disturbance in PMLSM Systems With Time Delay.

Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage.