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2022
Characterization analysis of quality factor, electro-mechanical coupling and spurious modes for AlN Lamb-wave resonators with <i>f</i><sub><i>s</i></sub> <i>></i> 2 GHz.
[DOI]
Shitao Lv
,
Zheng Zhu
,
Fei Long
,
Haiyan Sun
,
Chenguang Song
,
Aoyu Zhang
,
Fazeng Tan
,
Jicong Zhao
Microelectron. J., 2022