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2014
Reliability challenges for barrier/liner system in high aspect ratio through silicon vias.
[DOI]
Yunlong Li
,
Stefaan Van Huylenbroeck
,
Els Van Besien
,
Xiaoping Shi
,
Chen Wu
,
Michele Stucchi
,
Gerald Beyer
,
Eric Beyne
,
Ingrid De Wolf
,
Kristof Croes
Microelectron. Reliab., 2014