×
2023
Defect evolution in GaN thin film heterogeneously integrated with CMOS-compatible Si(100) substrate by ion-cutting technology.
[DOI]
Hangning Shi
,
Ailun Yi
,
Jiaxin Ding
,
Xudong Liu
,
Qingcheng Qin
,
Juemin Yi
,
Junjie Hu
,
Miao Wang
,
Demin Cai
,
Jianfeng Wang
,
Ke Xu
,
Fengwen Mu
,
Tadatomo Suga
,
René Heller
,
Mao Wang
,
Shengqiang Zhou
,
Wenhui Xu
,
Kai Huang
,
Tiangui You
,
Xin Ou
Sci. China Inf. Sci., November, 2023