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2015
An investigation of process dependence of porous IMD TDDB.
[DOI]
Wenyi Zhang
,
M. C. Silvestre
,
A. Selvam
,
E. Ramanathan
,
C. Ordonio
,
J. Schaller
,
Tian Shen
,
Kong Boon Yeap
,
C. Capasso
,
Patrick Justison
,
J. H. Lee
Proceedings of the IEEE International Reliability Physics Symposium, 2015