2015
Benefit of Al2O3/HfO2 bilayer for BEOL RRAM integration through 16kb memory cut characterization.
[DOI]
M. Azzaz
,
A. Benoist
,
Elisa Vianello
,
Daniele Garbin
,
Eric Jalaguier
,
Carlo Cagli
,
C. Charpin
,
Stefania Bernasconi
,
Simon Jeannot
,
T. Dewolf
,
G. Audoit
,
C. Guedj
,
S. Denorme
,
Philippe Candelier
,
Claire Fenouillet-Béranger
,
Luca Perniola
Proceedings of the 45th European Solid State Device Research Conference, 2015