Out-Of-Control Detection In Semiconductor Manufacturing using One-Class Support Vector Machines.
Proceedings of the 17th IEEE International Conference on Automation Science and Engineering, 2021
Virtual metrology for semiconductor manufacturing: Focus on transfer learning.
Proceedings of the 17th IEEE International Conference on Automation Science and Engineering, 2021
A Structure Data-Driven Framework for Virtual Metrology Modeling.
IEEE Trans Autom. Sci. Eng., 2020
A physics-informed Run-to-Run control framework for semiconductor manufacturing.
Expert Syst. Appl., 2020
Virtual Metrology Modeling based on Gaussian Bayesian Network.
Proceedings of the 2018 Winter Simulation Conference, 2018
Run-to-Run sensor variation monitoring for process fault diagnosis in semiconductor manufacturing.
Proceedings of the Winter Simulation Conference, 2016