Anne van Lievenoogen
According to our database1,
Anne van Lievenoogen
authored at least 2 papers
in 2013.
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Bibliography
2013
Applications of control systems and optimization in the design of semiconductor capital equipment.
Proceedings of the American Control Conference, 2013
Challenges in the application of hybrid reluctance actuators in scanning positioning stages in vacuum with nanometer accuracy and mGauss magnetic stray field.
Proceedings of the American Control Conference, 2013