Alicja Lesniewska
According to our database1,
Alicja Lesniewska
authored at least 13 papers
between 2015 and 2024.
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Bibliography
2024
Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND.
Proceedings of the IEEE International Reliability Physics Symposium, 2024
BEOL tip-to-tip dielectric reliability characterization using a design-representative test structure.
Proceedings of the IEEE International Reliability Physics Symposium, 2024
2023
Towards accurate temperature prediction in BEOL for reliability assessment (Invited).
Proceedings of the IEEE International Reliability Physics Symposium, 2023
2022
First demonstration of Two Metal Level Semi-damascene Interconnects with Fully Self-aligned Vias at 18MP.
Proceedings of the IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), 2022
Proceedings of the IEEE International Reliability Physics Symposium, 2022
2021
Proceedings of the IEEE International Reliability Physics Symposium, 2021
2020
Proceedings of the 2020 IEEE International Reliability Physics Symposium, 2020
2019
Role of Defects in the Reliability of HfO2/Si-Based Spacer Dielectric Stacks for Local Interconnects.
Proceedings of the IEEE International Reliability Physics Symposium, 2019
Proceedings of the IEEE International Reliability Physics Symposium, 2019
2018
Proceedings of the Optical Fiber Communications Conference and Exposition, 2018
Proceedings of the IEEE International Reliability Physics Symposium, 2018
Method to assess the impact of LER and spacing variation on BEOL dielectric reliability using 2D-field simulations for <20nm spacing.
Proceedings of the IEEE International Reliability Physics Symposium, 2018
2015
Proceedings of the IEEE International Reliability Physics Symposium, 2015