Alexey Shaporin
Orcid: 0009-0005-9214-3571
According to our database1,
Alexey Shaporin
authored at least 3 papers
between 2012 and 2020.
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Bibliography
2020
2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.
Sensors, 2020
2012
Proceedings of the International Multi-Conference on Systems, Signals & Devices, 2012
Proceedings of the International Multi-Conference on Systems, Signals & Devices, 2012