Alain Phommahaxay
According to our database1,
Alain Phommahaxay
authored at least 10 papers
between 2007 and 2024.
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Bibliography
2024
Clean Dicing: An Alternative Blade Dicing Technique for Minimising Particles in 3D Heterogeneous Integration.
Proceedings of the International 3D Systems Integration Conference, 2024
2019
Proceedings of the 2019 International 3D Systems Integration Conference (3DIC), 2019
Proceedings of the 2019 International 3D Systems Integration Conference (3DIC), 2019
2016
Importance of alignment control during permanent bonding and its impact on via-last alignment for high density 3D interconnects.
Proceedings of the 2016 IEEE International 3D Systems Integration Conference, 2016
2011
IEEE J. Solid State Circuits, 2011
Ultrathin wafer handling in 3D Stacked IC manufacturing combining a novel ZoneBOND™ temporary bonding process with room temperature peel debonding.
Proceedings of the 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31, 2011
Proceedings of the 2011 IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31, 2011
2010
Proceedings of the IEEE International Solid-State Circuits Conference, 2010
300mm wafer thinning and backside passivation compatibility with temporary wafer bonding for 3D stacked IC applications.
Proceedings of the IEEE International Conference on 3D System Integration, 2010
2007
Surface Conditioning Effect on Vacuum Microelectronics Components Fabricated by Deep Reactive Ion Etching
CoRR, 2007