Akemi Moniwa

According to our database, Akemi Moniwa authored at least 3 papers in 1987.

Collaborative distances:

• Dijkstra number of five.
• Erdős number of five.

1987

A Two-Dimensional Integrated Process Simulator: SPIRIT-I.

Masanori Ohgo, Yasuko Takano, Akemi Moniwa, Shuichi Yamamoto, Yoshio Sakai, Hiroo Masuda, Hideo Sunami

IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1987

A Three-Dimensional Photoresist Imaging Process Simulator for Strong Standing-Wave Effect Environment.

Akemi Moniwa, Toshiharu Matsuzawa, Tetsuo Ito, Hideo Sunami

IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1987

Two-Dimensional Simulation of Photolithography on Reflective Stepped Substrate.

Teruo Matsuzawa, Akemi Moniwa, N. Hasegawa, Hideo Sunami

IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 1987