Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both Sensitive and Structural Components. - Xiaoshan Tong; Yulong Zhao; Xin Ma; Peng Guo; Qi Zhang; Mingjie Liu; Dongliang Zhang; Aiying Wang (IEEE SENSORS, 2019)

Diamond-like carbon based micro-pressure sensor with ultra-thin sensitive membrane. - Xin Ma; Qi Zhang; Peng Guo; Yulong Zhao; Aiying Wang (IEEE SENSORS, 2021)